Razor Vapor Silver Bedienungsanleitung

Operation and Maintenance Manual 2” and 3″ Resistive Substrate Heaters Model No. Serial No. 5830 Hellyer Ave San Jose, CA 95138 PH:

SUBSTRATE HEATER CLEANING 1. Scrape residual silver paste off with a razor blade. 2. Wipe off loose particles with a clean room wiper and isopropyl

VI. TROUBLESHOOTING SYMPTOM POSSIBLE CAUSE 1. Slight temperature drop during process as material is deposited.  Emissivity of heater is changin

VII. SPECIFICATIONS 2” 3” 1) Maximum Temperature 950°C 950°C 2) Temperature Stability ±2% ±2% 3) Temperature Uniformity ±4°C ±

VIII. OPERATING DATA Typical power, voltage, and current versus temperature data (in air). Back to Table of Contents Issued September 11, 2008 13

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ACCESSORIES Part Number DescriptionSU-900-AGP Silver Paste for substrate mounting (SU-200-HH and SU-300-HH ONLY) SU-905-275 Mounting Feedthrough

WARNING The Maximum Heater Current Limits are: 2” = 10 Amps 3” = 9 Amps The Maximum Heater Voltage Limits are: 2” = 45 volts DC or ACrm

TABLE OF CONTENTS INTRODUCTION 4 PRE-INSTALLATION 4 INSTALLATION 5 OPERATION 9 MAINTENANCE 10

I. INTRODUCTION The High Temperature Resistive Substrate Heater is specifically designed to provide stable, uniform heating of substrates during thin

III. INSTALLATION When installing the heater, it is important to determine what type of equipment will be in close proximity to it. Even though many

IMPORTANT Install a 12 amp in-line fuse between the power supply output and the electrical feedthrough. This will prevent damage to the heater due to

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Back to Table of Contents Issued September 11, 2008 8

IV. OPERATION After initial burn-in, the unit can be turned up to full power instantaneously. During operation, it is important to remember not to e